Tuesday, 27 June 2006: 8:15 AM-11:45 AM
Bonanza Room B (John Ascuaga’s Nugget Casino Resort)
Semiconductor Fabrication Chemistry (Invited and Contributed Speakers)
The Semiconductor Fabrication Chemistry section will focus on new science in support of solid state system processing. The semiconductor industry is a fast paced driver of new surface science methods and discoveries to solve tomorrow’s problems enabling smaller devices and faster processing times. Discussions in this section will range from ultrahigh vacuum research to supercritical fluid processing and a description of analytical techniques and their application in the semiconductor industry.
Organizer:April Carman
8:15 AMTemperature Programmed Investigation of in-situ and ex-situ silicon functionalization
Sean M. Casey, Michael V. Lee, Matthew R. Linford
8:45 AMConjugated ionomer devices: fabrication and properties
Mark C. Lonergan
9:15 AMDense oxide films and laminates via low-temperature solution processing
Jeremy T. Anderson, Douglas A. Keszler, Tran M. Phung, David C. Johnson
9:45 AMBreak
10:15 AMEnvironmentally Sustainable Process Chemistry at Solid Surfaces using Supercritical CO2
Anthony J. Muscat
10:45 AMAdvanced materials deposition for semiconductor nanostructures using supercritical fluid
Chien Wai

Back to The 61st Northwest Regional Meeting (June 25 - 28, 2006)